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Manuscript ID. 0005
Paper No. 2025-Tue-P0401-P001
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| Kun-Yu Lai
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The Blood Test for Lung Cancer by InGaN Quantum Wells
Kun-Yu Lai, Thuy Doan Khanh Huynh, Huy Kim Nhat, Fan-Ching Chien, National Central University; Yu‑Chi Chiu, Taoyuan General Hospital; Yu‑Chi Chiu, Yuanpei University of Medical Technology; Pin-Kuei Fu, Taichung Veterans General Hospital; Pin-Kuei Fu, National Chung Hsing University
We propose a blood test for lung cancer by the surface-enhance Raman spectroscopy (SERS) built with InGaN quantum wells. According to the clinical test result with 126 samples, the test accuracy of lung cancer is 99.7 %.
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Manuscript ID. 0097
Paper No. 2025-Tue-P0401-P002
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| Kun-Yu Lai
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Growth of Boron Nitride on (100) Silicon Substrates
Chen-Da Du, Kun-Yu Lai, National Central University
Boron nitride (BN) was epitaxially grown on high-resistivity (100) silicon substrates by metal-organic chemical vapor deposition (MOCVD). It is found that a transition from turbostratic BN (tBN) to hexagonal BN (hBN) was formed in the first few atomic layers on the Si substrate. The formation of tBN is believed to relieve the strain between BN and Si.
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Manuscript ID. 0054
Paper No. 2025-Tue-P0401-P003
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| Chiao-Chih Lin
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Coupling between WSe2 and Plasmonic Structure
Chiao-Chih Lin, Program on Key Material, Academy of Innovative Semiconductor and Sustainable Manufacturing, National Cheng Kung University, Tainan, Taiwan; Zhe-Wei Hsu, Yu-Hsun Chou, Department of Photonics, National Cheng Kung University, Tainan, Taiwan
This work demonstrates a semiconductor–insulator–metal (SIM) light-emitting device integrating monolayer transition metal dichalcogenides and nano plasmonic structures. High-quality 2D materials were prepared by mechanical exfoliation and dry transfer. Plasmonic nanostructures, designed via finite element method (FEM) to match emission wavelengths, significantly enhance photoluminescence through localized field confinement and the Purcell effect. Experimental results show pronounced emission enhancement across different TMDCs, confirming efficient exciton–plasmon coupling and the potential of this hybrid platform for next-generation optoelectronic devices.
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Manuscript ID. 0052
Paper No. 2025-Tue-P0401-P004
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| Che-Hao Liao
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Formation of non-polar and semi-polar AlN planes via microwave annealing of AlN on AAO templates
Chien-Sheng Huang, Basheer Baba, Yi-Tang Lin, He-Han Wu, Che-Hao Liao, Department of Electronic Engineering, National Yunlin University of Science and Technology; Xiao Tang, School of Electrical, Electronic and Mechanical Engineering, University of Bristol
This study explores the fabrication of non-polar and semi-polar AlN films using anodic aluminum oxide (AAO) on Si(100) substrates. A nanoporous AAO buffer layer is formed via anodization using oxalic acid, with pore size controlled by anodizing voltage and time. AlN films are then deposited by RF sputtering and microwave annealing. XRD analysis reveals that non-polar AlN(100) orientation dominates after annealing at 3000 W for 600 seconds, while semi-polar AlN(101) appears at lower annealing conditions. The highest domain sizes of 14.3 nm for non-polar AlN(100) and 28.8 nm for semi-polar AlN(101) are achieved, indicating tunable crystallinity via microwave annealing parameters.
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Manuscript ID. 0076
Paper No. 2025-Tue-P0401-P005
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| Che-Hao Liao
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Sensitivity Enhancement of Aluminum Nitride Surface Acoustic Wave Humidity Sensors Using Silica Nanospheres
Che-Hao Liao, Lu-Xiang Wang, I-Ten Chen, Shih-Hung Lin, Chien-Sheng Huang, Department of Electronic Engineering, National Yunlin University of Science and Technology
Surface acoustic wave (SAW) devices are extensively utilized in wireless communication and sensing due to their superior performance. This study develops an AlN-based SAW humidity sensor by depositing an AlN film on sapphire via MOCVD and patterning 10 μm interdigitated electrodes (IDEs) using photolithography. To enhance performance, silica nanospheres (SNs) with different ethanol diluted ratios were spin-coated at varying concentrations. The modified AlN SAW sensor, prepared by spin-coating silica nanospheres diluted in ethanol at a 1:1 ratio at 8000 rpm, exhibited a frequency shift of 830 kHz and a sensitivity of 10.4 kHz/%RH, representing a 2.44-fold improvement compared to the unmodified device.
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